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J. Korean Ceram. Soc. > Volume 31(2); 1994 > Article
Journal of the Korean Ceramic Society 1994;31(2): 227.
RF-Magnetron Sputtering에 의한 Bi-Sr-Ca-Cu-O 초전도 박막의 제조
홍철민, 박현수
전남대학교 무기재료공학과
Fabrication and Bi-Sr-Ca-Cu-O Superconducting Thin Films by RF Magnetron Sputtering
The Bi-Sr-Ca-Cu-O thin films were deposited by RF-magnetron sputtering method on Si(P-111) wafer without a buffer layer and annealed at various temperatures in oxygen atmosphere. The temperature dependence of electrical resistance, the microstructure of intermediate phase, and the surface morphology of films were examined by four probe method, XRD, and SEM, respectively. The chemical composition and the depth profile of the films were determined by ESCA spectra. Thin films annealed at $600^{circ}C$ and $700^{circ}C$ in oxygen atmosphere showed onset temperatures of 90 K and 85K, and Tc(zero) of 22K and 31K, respectively. The sample annealed at $700^{circ}C$ had the highest volume fraction of superconducting phase and showed smooth microsturcture. In ESCA spectra, the thin films were homogeneous with depth.
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