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J. Korean Ceram. Soc. > Volume 40(8); 2003 > Article
Journal of the Korean Ceramic Society 2003;40(8): 739.
doi: https://doi.org/10.4191/kcers.2003.40.8.739
반응성 직류 스퍼터법에 의한 질화 인듐 박막의 제막 특성
송풍근, 류봉기1, 김광호1
아오야마가꾸인대학 이공학부 화학과
1부산대학교 무기재료공학과
Deposition Characteristic of InNx Films by Reactive DC Magnetron Sputtering
In $N_{x}$ films were deposited on soda-lime glass without substrate heating by reactive dc magnetron sputtering using indium (In) metal target. Depositions were carried out under various total gas pressures ( $P_{tot}$) of mixture gases (Ar+$N_2$ or He+$N_2$). He gas was introduced to $N_2$ gas in order to enhance the reactivity of nitrogen on film surface by the "penning ionization". Plasma impedance decreased greatly when 20% or more introduced the $N_2$ gas. This is due to the In $N_{x}$ layers formed on target surface because a secondary electron emission rate of InN is small compared with In metal. XRD patterns of the films revealed that <001> preferred oriented polycrystalline In $N_{x}$ films, where the crystallinity of the films was improved with decrease of $P_{tot}$ and with increase of $N_2$ flow ratio. The improvement of the crystallinity and stoichimetry of the In $N_{x}$ films were considered to be caused by an increase in the activated nitrogen radicals and also by an increase in the kinetic energy of sputtered In atoms arriving at growing film surface, which should enhance the chemical reaction and surface migration on the growing film surface, respectively. Furthermore, the films deposited using mixture gases of He+$N_2$ showed higher crystallinity compared with the film deposited by the mixture gases of Ar+$N_2$.$.EX>.
Key words: Indium nitirde, Reactive dc magnetron sputtering, Crystallinity, Stochiometry
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