Crystallization and Crack Formation in Sol-Gel PLZT Thin Films

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J. Korean Ceram. Soc. > Volume 29(3); 1992 > Article

Journal of the Korean Ceramic Society 1992;29(3): 216.

졸-겔법에 의한 PLZT 박막의 결정화 및 균열 생성

안기철, 이전국¹, 김호기, 노광수

한국과학기술원 무기재료공학과
¹한국과학기술원 세라믹스부

Crystallization and Crack Formation in Sol-Gel PLZT Thin Films

ABSTRACT

PLZT thin films were prepared using sol-gel spin coating. The films mainly consisted of perovskite phase when heat treated at 600$^{circ}C$ and in O2 or air atmosphere for 2 hours after 7 coating cycles. Cracks were formed when smaller than after 9 coating cycles. When ITO interlayer existed between Corning 7059 glass substrate and the film, cracks were not formed after 9 coating cycles, but cracks were formed after 11 coating cycles because of large volume change of the film contracting on the substrate during the heat treatment. In the observation of microstructure, the thin films have perovskite phase of about 2 $mutextrm{m}$ grain size and pyrochlore phase of 100∼200${AA}$ grain size.