Composition Control and Annealing Effects on the Growth of YBaCuO Superconducting Thin Films by RF Magnetron Sputtering

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J. Korean Ceram. Soc. > Volume 27(2); 1990 > Article

Journal of the Korean Ceramic Society 1990;27(2): 249.

RF Magnetron Sputtering 방법에 의한 고온 초전도 박막 제조를 위한 조성 조절 및 열처리 효과

한택상, 김영환, 염상섭, 최상삼, 박순자¹

한국과학기술연구원 초전도연구실
¹서울대학교 무기재료공학과

Composition Control and Annealing Effects on the Growth of YBaCuO Superconducting Thin Films by RF Magnetron Sputtering

ABSTRACT

High Tc Supperconducting thin films were fabricated by rf magnetron sputtering method. We have successfully controlled the compositions of films by adding sintered CuO pellets on YBa2Cu3O7-x single target. High Tc thin films with large grian size and good crystal habit were obtained by rapid thermal annealing process. The films deposited on SrTiO3(100) single crystal substrate indicated the existence of c-axis prefered orientation confirmed by XRD and SEM analysis. The Tc, zero's of sharp resistive transition for rapid annealed films deposited on polycrystalline YSZ substrate and on SrTiO3(100) single crystal substrate were 79K and 88K, respectively.