Preparation of <tex>$CeO_2$</tex> Based Solid Electrolyte Thin Films by Electrochemical Vapor Deposition

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J. Korean Ceram. Soc. > Volume 34(10); 1997 > Article

Journal of the Korean Ceramic Society 1997;34(10): 1067.

전기화학증착법에 의한 $CeO_2$계 고체전해질 박막의 제조

박동원, 김대룡

경북대학교 공과대학 금속공학과

Preparation of $CeO_2$ Based Solid Electrolyte Thin Films by Electrochemical Vapor Deposition

ABSTRACT

The yttria doped ceria (YDC) thin films were fabricated by electrochemical vapor deposition on the porous $alpha$-Al2O3 substrate. The growth rates of the films obeyed a parabolic rate law, which constant was 259.0 $m^2$/hr at 120$0^{circ}C$. As deposition temperature (above 110$0^{circ}C$) increased, dense thin films were enhanced. Mole fraction of XYC13 had an effect upon surface morphologies. Electrical conductivity was increased with deposition temperature. The conductivity of YDC film prepared at XYC13=7.9$times$10-2 was about 0.097 S/cm at 104$0^{circ}C$ and the activation energy of conduction was calculated to be 26.6 kcal/mol.

Key words: EVD, YDC, Surface morphology, Electrical conductivity