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J. Korean Ceram. Soc. > Volume 41(9); 2004 > Article
Journal of the Korean Ceramic Society 2004;41(9): 653.
doi: https://doi.org/10.4191/kcers.2004.41.9.653
열분해법으로 형성된 산화크롬 박막의 자기적 특성
최현주, 임대순1, 이전국
한국과학기술연구원 박막재료연구센터
1고려대학교 재료공학과
Magnetic Properties of CrO2 Thin Films Deposited by Thermal Deposition
Hyun-Ju Choi, Dae-Soon Lim1, Jeon-Kook Lee
ABSTRACT
We report the magnetic properties, microstructures, and crystal orientations of the CrO$_2$ thin films on TiO$_2$ single crystals. CrO$_2$ thin films were deposited by thermal decompositions with CrO$_3$ source materials. The microstructure of (110) oriented CrO$_2$ thin films deposited on (110) TiO$_2$ single crystals were uniform. As the oxygen flow rates increased, the resistivity, coercive field, and remnant magnetization of the CrO$_2$ thin films on TiO$_2$ single crystals decreased.
Key words: Half-metal, CrO$_2$, Chemical Vapor Deposition, (110) orientation
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