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J. Korean Ceram. Soc.
>
Volume 61(2); 2024
> Article
Original Article
Journal of the Korean Ceramic Society 2024;61(2): 327-334.
doi:
https://doi.org/10.1007/s43207-023-00361-x
Exploring the role of TiN electrodes in the formation of ferroelectric Hf
x
Zr
1-x
O
2
thin films through transmission electron microscopy
Sojin Kim
1
,
Jaewook Lee
2
,
Jong Hyeok Seo
3
,
Jinseok Hong
1
,
Ji‑Hwan Kwon
3
,
Min Hyuk Park
2
,
Seung‑Yong Lee
1