Preparation and Electrical Properties of <TEX>$ErMnO_3$</TEX>Thin Film Using Sol-Gel Process

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J. Korean Ceram. Soc. > Volume 37(10); 2000 > Article

Journal of the Korean Ceramic Society 2000;37(10): 981.

Sol-Gel 공정을 이용한 $ErMnO_3$박막 제조 및 전기적 특성

류재호, 김유택, 김응수, 강승구, 심광보¹

경기대학교 재료공학과
¹한양대학교 세라믹공학과

Preparation and Electrical Properties of $ErMnO_3$Thin Film Using Sol-Gel Process

Key words: $ErMnO_3$, Sol-gel process, Leakage current, Preferred orientation

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