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J. Korean Ceram. Soc. > Volume 59(5); 2022 > Article
Journal of the Korean Ceramic Society 2022;59(5): 671-678.
doi: https://doi.org/10.1007/s43207-022-00206-z
Dielectric properties of silicon-doped α-alumina derived from sol–gel process
Seong Guk Jeong1, Can Wang1, Jong Hee Kim1, Dae-Ho Yoon1,2
1School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 16419, Korea
2SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University (SKKU), Suwon 440-746, Republic of Korea
Correspondence  Dae-Ho Yoon ,Email: dhyoon@skku.edu
Received: November 2, 2021; Revised: March 22, 2022   Accepted: April 1, 2022.  Published online: May 2, 2022.
In this study, silicon-doped alumina (Al2O3) was synthesized using the sol–gel method. The composition and structure of silicon-doped alumina were analyzed using thermogravimetric-differential thermal analysis, X-ray diffraction, scanning electron microscopy, and X-ray photoelectron spectroscopy. As a result, it was found that the particle size of the silicondoped alumina was uniform, and the silicon doped in the α-Al2O3 lattice occupied the space of the oxygen octahedron to form a structure based on the Al–O–Si bond. Also, because of measuring the change in dielectric constant according to the amount of doped silicon, a value of the dielectric constant of 3.1 at 1 GHz frequency when the silicon doping amount was 2%. Therefore, it is thought to be applicable to the fields of microelectronics, electronic packaging and interconnection, small antenna arrays, and capacitors that require low-k materials.
Key words: Alumina nanoparticle · Si doping · α Phase · Dielectric properties
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