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J. Korean Ceram. Soc. > Volume 35(11); 1998 > Article
Journal of the Korean Ceramic Society 1998;35(11): 1233.
열필라멘트법에 의한 다이아몬드 CVD반응의 기상 조성 분석
청주대학교 이공대학 화학과
Gas Phase Analysis of the Diamond CVD Reaction by Hot Filament Method
Gas phase compositions of the hot filament-assisted diamond CVD reaction were analyzed by on-line quadrupole mass analysis(QMA) technique. D2 isotope experiments showed that methance molecules were decomposed into atomic state and then recombined in to acetylene during transport the probe line. Although acetylene or ethylene was supplied instead of methane similar gas compositions were obtained when filament temperature was above 1500$^{circ}C$ Therefore this system could be assumed near thermal equilibrium state. Filament temperature and reaction pressure variation experiments exhibited the same tendency between acetylene concentration and diamond growth rate and these results implied that acetylene molecule played the role of the reactive species in the diamond CVD reaction.
Key words: Diamond CVD, QMA, D2 isotope
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