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J. Korean Ceram. Soc. > Volume 38(1); 2001 > Article
Journal of the Korean Ceramic Society 2001;38(1): 34.
Hot Filament CVD 방법을 이용한 Nanocrystalline Diamond 박막 합성
강민식, 이욱성1, 백영준1, 채기웅2, 임대순3
고려대학교 재료공학과, 한국과학기술연구원 박막기술연구센터
1한국과학기술연구원 박막기술연구센터
2호서대학교 재료공학과
3고려대학교 재료공학과
Synthesis of Nanocrystalline Diamond Film by Hot Filament CVD Method
Key words: Hot filament CVD, Pressure, Nanocrystalline diamond film, Microcrystalline diamond film
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