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J. Korean Ceram. Soc. > Volume 35(8); 1998 > Article
Journal of the Korean Ceramic Society 1998;35(8): 819.
SrBi$_2$Ta$_2$O$_9$ 박막의 배향성장에 미치는 Sr양의 영향
배철휘, 이전국, 이시형1, 정형진
한국과학기술연구원 박막기술연구센터
1한국과학기술연구원 박막기술연구센
Effect of Sr Content on the Oriented Growth of SrBi$_2$Ta$_2$O$_9$ Thin Films
SBT thin films were deposited on Pt(111)/Ti/{{{{ { SiO}_{2 } }}/Si(100) substrates using r. f magnetron sputtering and post-annealed at 650-80$0^{circ}C$ In the cases of SBT thin films with nearly 30mol% excess Bi after post-an-nealing Sr deficient SBT thin films(Sr/Ta≒0.45) showed c-axis oriented growth. However SBT thin films which have stoichiometric Sr content showed a-axis oriented growth. In addition the SBT thin films with stoichiometric Sr content had larger remnant polarization and lower phase formation and grain growth tem-perature than the Sr deficient SBT thin films
Key words: SrBi$_2$Ta$_2$O$_9$ Oriented growth, Sr content
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