CVD에 의한 알루미나 멤브레인의 표면개질에 관한 연구 |
이동호, 최두진, 현상훈, 고광백1 |
연세대학교 세라믹공학과 1연세대학교 도시공학과 |
The Study on Surface Modification of Alumina Membrane by CVD |
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ABSTRACT |
The change of permeation mechanism from Knudsen diffusion to micropore diffusion was observed after CVD modification of an alumina-sol coated alumina support which was prepared by slip coating process. Permselectivities of He/N2, H2/N2, and CO2/N2 were 5.67, 5.02, and 1.44, respectively. These values were higher than those under Knudsen diffusion controlled region. |
Key words:
CVD, Al2O3, Surface modification, Permselectivity, Membrane |
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