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Characteristics of HfN coatings by inductively coupled plasma-assisted magnetron sputtering

Sung-Yong Chun

J. Korean Ceram. Soc. 2021;58(2):178-183. Published online March 31, 2021
DOI: https://doi.org/10.1007/s43207-020-00084-3

Cited By 5

Properties of VN Coatings Deposited by ICP Assisted Sputtering: Effect of ICP Power

Sung-Yong Chun

J. Korean Ceram. Soc. 2017;54(1):38-42. Published online January 31, 2017
DOI: https://doi.org/10.4191/kcers.2017.54.1.05

Cited By 6

Crystal Structure, Microstructure and Mechanical Properties of NbN Coatings Deposited by Asymmetric Bipolar Pulsed DC Sputtering

Sung-Yong Chun, Hyun-Ho Im

J. Korean Ceram. Soc. 2017;54(1):33-37. Published online January 31, 2017
DOI: https://doi.org/10.4191/kcers.2017.54.1.02

Cited By 4

Effects of Duty Cycle and Pulse Frequency on the Microstructure and Mechanical Properties of TiAlN Coatings

Sung-Yong Chun, Ju Yeon Hwang

J. Korean Ceram. Soc. 2014;51(5):447
DOI: https://doi.org/10.4191/kcers.2014.51.5.447

Cited By 1

A Comparative Study of Nanocrystalline TiAlN Coatings Fabricated by Direct Current and Inductively Coupled Plasma Assisted Magnetron Sputtering

Sung-Yong Chun, Se-Chul Kim

J. Korean Ceram. Soc. 2014;51(5):375
DOI: https://doi.org/10.4191/kcers.2014.51.5.375

Cited By 1

A Comparative Study of CrN Coatings Deposited by DC and Pulsed DC Asymmetric Bipolar Sputtering for a Polymer Electrolyte Membrane Fuel Cell (PEMFC) Metallic Bipolar Plate

Sang-Won Park, Sung-Yong Chun

J. Korean Ceram. Soc. 2013;50(6):390
DOI: https://doi.org/10.4191/kcers.2013.50.6.390

Cited By 4

Effect of Inductively Coupled Plasma (ICP) Power on the Properties of Ultra Hard Nanocrystalline TiN Coatings

Sung-Yong Chun

J. Korean Ceram. Soc. 2013;50(3):212
DOI: https://doi.org/10.4191/kcers.2013.50.3.212

Cited By 2

Growth Behavior of Nanocrystalline CrN Coatings by Inductively Coupled Plasma (ICP) Assisted Magnetron Sputtering

Dae-Han Seo, Sung-Yong Chun

J. Korean Ceram. Soc. 2012;49(6):556
DOI: https://doi.org/10.4191/kcers.2012.49.6.556

Cited By 3

Growing Behavior of Nanocrystalline TiN Films by Asymmetric Pulsed DC Reactive Magnetron Sputtering

Man-Geun Han, Sung-Yong Chun

J. Korean Ceram. Soc. 2011;48(5):342
DOI: https://doi.org/10.4191/kcers.2011.48.5.342

Cited By 8

Microstructure and Mechanical Properties of Nanocrystalline TiN Films Through Increasing Substrate Bias

Sung-Yong Chun

J. Korean Ceram. Soc. 2010;47(6):479
DOI: https://doi.org/10.4191/kcers.2010.47.6.479

Cited By 9

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