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Thermal Annealing Effect on the Machining Damage for the Single Crystalline Silicon
정상훈, 정성민, 오한석, 이홍림
J. Korean Ceram. Soc.
2003;40(8):770
DOI:
https://doi.org/10.4191/kcers.2003.40.8.770
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5