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Nanoindentation Experiments on MEMS Device

한준희, 박준협, 김광석, 이상율

J. Korean Ceram. Soc. 2003;40(7):657
DOI: https://doi.org/10.4191/kcers.2003.40.7.657

Anisotropic Silicon Etching Using $RuO_2$ Thin Film as a Mask Layer by TMAH Solution

이재복, 오세훈, 홍경일, 최덕균

J. Korean Ceram. Soc. 1997;34(10):1021

Analysis of Bridging Stress Effect of Polycrystalline Aluminas Using Double Cantilever Beam Method II. Development of Double Cantilever Beam Method Considering Bridging Effect

손기선, 이성학, 백성기

J. Korean Ceram. Soc. 1996;33(5):590

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