| RF 유도결합 열 플라즈마를 이용한 암모니아와 질소분위기에서 고순도 AlN 나노 분말의 합성 |
| 김경인, 최성철1, 김진호, 황광택, 한규성 |
한국세라믹기술원 이천분원
1한양대학교 신소재공학부 |
| Synthesis of High Purity Aluminum Nitride Nanopowder in Ammonia and Nitrogen Atmosphere by RF Induction Thermal Plasma |
| Kyung-In Kim, Sung-Churl Choi1, Jin-Ho Kim, Kwang-Taek Hwang, Kyu-Sung Han |
Icheon Branch, Korea Institute of Ceramic Engineering and Technology
1Department of Advanced Materials Science and Engineering, Hanyang University |
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| ABSTRACT |
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High-purity aluminum nitride nanopowders were synthesized using an RF induction thermal plasma instrument. Ammonia and nitrogen gases were used as sheath gas to control the reactor atmosphere. Synthesized AlN nanopowders were characterized by XRD, SEM, TEM, EDS, BET, FTIR, and N-O analyses. It was possible to synthesize high-purity AlN nanoparticles through control of the ammonia gas flow rate. However, additional process parameters such as plasma power and reactor pressure had to be controlled for the production of high-purity AlN nanopowders using nitrogen gas. |
| Key words:
Aluminum nitride, Nanopowder, RF induction thermal plasma, Ammonia gas, Nitrogen gas |
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