| Gel-Casting 및 마이크로파 기상반응소결에 의한 질화규소 세라믹 제조에 대한 연구(II) : 마이크로파에 의한 실리콘의 질화반응 및 질화규소의 소결 |
| 배강, 우상국, 한인섭, 서두원 |
| 한국에너지기술연구원 에너지소재연구센터 |
| Fabrication of Silicon Nitride Ceramics by Gel-Casting and Microwave Gas Phase Reaction Sintering(II) : Microwave Nitridation of Silicon and Microwave Sintering of Silicon Nitride |
| Kang Bai, Sang-Kuk Woo, In-Sub Han, Doo-Won Seo |
| Energy Materials Research Center, Korea Institute of Energy Research |
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| ABSTRACT |
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Silicon nitride ceramics were prepared by microwave gas phase reaction sintering. By this method higher density specimens were obtained for short time and at low temperature, compared than ones by conventional pressureless sintering, even though sintering behaviors showed same trend, the relative density of sintered body inverse-exponentially increases with sintering temperature and/or holding time. And grain size of ${beta}$-phase of the microwave sintered body is bigger than one of the conventional pressureless sintered one. Also they showed good bending strengths and thermal shock resistances. |
| Key words:
Silicon nitride ceramics, Gas phase reaction, Microwave silicon nitridation, Microwave sintering, Phase transformation |
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