| N2O 반응 가스를 주입한 RF Reactive Magnetron Sputtering에 의한 ZrO2 박막의 구조 및 부식특성 연구 |
| 지승현, 이석희, 백종혁1, 김준환1, 윤영수 |
연세대학교 신소재공학과
1한국원자력연구원 |
| Structural and Corrosive Properties of ZrO2 Thin Films using N2O as a Reactive Gas by RF Reactive Magnetron Sputtering |
| Seung-Hyun Jee, Seok-Hee Lee, Jong-Hyuk Baek1, Jun-Hwan Kim1, Young-Soo Yoon |
Department of Materials Science and Engineering, Yonsei University
1Korea Atomic Energy Research Institute |
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| ABSTRACT |
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A $ZrO_2$ thin film as a corrosion protective layer was deposited on Zircaloy-4 (Z-4) clad material using $N_2O$ as a reactive gas by RF reactive magnetron sputtering at room temperature. The Z-4 substrate was located in plasma or out of plasma during the $ZrO_2$ deposition process to investigate mechanical and corrosive properties for the plasma immersion. Tetragonal and monoclinic phases were existed in $ZrO_2$ thin film immersed in plasma. We observed that a grain size of the $ZrO_2$ thin film immersed in plasma state is larger than that of the $ZrO_2$ thin film out of plasma state. In addition, the corrosive property of the $ZrO_2$ thin films in the plasma was characterized using the weight gains of Z-4 after the corrosion test. Compared with the $ZrO_2$ thin film immersed out of plasma, the weight gains of $ZrO_2$ thin film immersed in plasma were larger. These results indicate that the $ZrO_2$ film with the tetragonal phase in the $ZrO_2$ can protect the Z-4 from corrosive phenomena. |
| Key words:
Protective layer, $N_2O$ reactive gas, Zirconium oxide($ZrO_2$), Cladding material, Corrosion |
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