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J. Korean Ceram. Soc. > Volume 46(6); 2009 > Article
Journal of the Korean Ceramic Society 2009;46(6): 673.
doi: https://doi.org/10.4191/kcers.2009.46.6.673
스퍼터링법으로 증착된 산화아연 박막의 구조적 성질에 대한 산화마그네슘 완충층의 효과 연구
한국세라믹기술원 그린세라믹본부
Effect of MgO Buffer Layer on the Structural Properties of Sputter-grown ZnO Thin Film
Young-Soo Lim
Green Ceramics Division, Korea Institute of Ceramic Engineering and Technology
The effect of MgO buffer layer on the structural properties of sputter-grown ZnO thin film was investigated. Sapphire (0001) and Si (100) substrate were used for the growth and MgO buffer layer was inserted between ZnO thin film and the substrate. X-ray diffraction pattern indicated that enhanced crystallinity in the ZnO thin film grown was achieved by inserting very thin MgO buffer layer, regardless of the substrate type. The strain in the ZnO thin film could also be controlled by the insertion of the MgO buffer layer, and tendency of the strain was strongly dependent on the substrate type.
Key words: ZnO, MgO, Buffer layer, Sputtering
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