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J. Korean Ceram. Soc. > Volume 46(6); 2009 > Article
Journal of the Korean Ceramic Society 2009;46(6): 685.
doi: https://doi.org/10.4191/kcers.2009.46.6.685
등방성 에칭용액을 이용한 다결정 실리콘의 표면조직화
음정현, 최관영1, 남산2, 최균1
한국세라믹기술원 이천분원,고려대학교 재료공학부
1한국세라믹기술원 이천분원
2고려대학교 재료공학부
Texturing of Multi-crystalline Silicon Using Isotropic Etching Solution
Jung-Hyun Eum, Kwan-Young Choi1, Sahn Nahm2, Kyoon Choi1
KICET Icheon Branch,Department of Material Science & Engineering, Korea University
1KICET Icheon Branch
2Department of Material Science & Engineering, Korea University
Surface Texturing is very important process for high cell efficiency in crystalline silicon solar cell. Anisotropic texturing with an alkali etchant was known not to be able to produce uniform surface morphology in multi-crystalline silicon (mc-Si), because of its different etching rate with random crystal orientation. In order to reduce surface reflectance of mc-Si wafer, the general etching tendency was studied with HF/HN$O_3$/De-ionized Water acidic solution. And the surface structures of textured mc-Si in various HF/HN$O_3$ ratios were compared. The surface morphology and reflectance of textured silicon wafers were measured by FE-SEM and UVvisible spectrophotometer, respectively. We obtained average reflectance of $16{sim}19$% for wavelength between 400 nm and 900 nm depending on different etching conditions.
Key words: Isotropic texturing, Alkali solution, Multi-crystalline silicon, Reflectance
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