| 불소계 플라즈마에 노출된 YAG 세라믹스의 식각거동 및 XPS 분석 |
| 김경범, 김대민, 이정기1, 오윤석, 김형태, 김형순1, 이성민 |
한국세라믹기술원 이천분원 엔지니어링세라믹센터
1인하대학교 신소재공학부 |
| Erosion Behavior of YAG Ceramics under Fluorine Plasma and their XPS Analysis |
| Kyeong-Beom Kim, Dae-Min Kim, Jung-Ki Lee1, Yoon-Suk Oh, Hyung-Tae Kim, Hyung-Sun Kim1, Sung-Min Lee |
Korea Institute of Ceramic Engineering and Technology(Icheon)
1School of Materials Engineering, Inha University |
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| ABSTRACT |
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Chemical composition and status of chemical bonding of the YAG($Y_3Al_5O_{12}$) ceramics after the exposure to fluorine plasma have been investigated using X-ray photoelectron spectroscopy, with the analysis on its erosion behavior. On the surface, F showed the maximum content, decreasing with depth, meanwhile the cation composition remained almost constant, irrespective of the position. The peaks due to Y in the reaction layer consisted of two kinds, showing the Y-O and Y-F bonds. These surface modifications under fluorine plasma seem to promote the erosion of the YAG ceramics. Excess addition of $Al_2O_3$ or $Y_2O_3$ into stoichiometric YAG produced 2nd phases of $Al_2O_3$ and $YAlO_3$, respectively, resulting in the slight difference in the local erosion rates. But, the overall average erosion rate was not sensitive to such excess additions of $Al_2O_3$ or $Y_2O_3$. |
| Key words:
YAG($Y_3Al_5O_{12}$), Plasma resistance, Erosion, X-ray photoelectron spectroscopy |
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