| 에어로졸 데포지션에 의한 이트리아 필름의 미세구조와 특성 |
| 이병국, 박동수, 윤운하, 류정호, 한병동, 최종진 |
| 재료연구소 기능재료연구본부 기능세라믹그룹 |
| Microstructure and Properties of Yttria Film Prepared by Aerosol Deposition |
| Byung-Kuk Lee, Dong-Soo Park, Woon-Ha Yoon, Jung-Ho Ryu, Byung-Dong Hahn, Jong-Jin Choi |
| Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science |
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| ABSTRACT |
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Dense crack-free yttria film with 10 $mu m$ thickness was prepared on aluminum by aerosol deposition. X-ray diffraction pattern on the film showed that it contained the same crystalline phase as the raw powder. Transmission electron microscopy revealed a nanostructured yttria film with grains smaller than 100 nm. Tensile adhesion strength between the film and aluminum substrate was 57.8 $pm$ 6.3MPa. According to the etching test with $CF_4-O_2$ plasma, the etching rate of the yttria film was 1/100 that of quartz, 1/10 that of sintered alumina and comparable to that of sintered yttria. |
| Key words:
Microstructure, Corrosion resistance, Thick film, Adhesion |
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