Low k Materials for High Frequency High Integration Modules |
Yoon-Soo Na, Tae-Young Lim1, Jin-Ho Kim1, Hyo-Soon Shin1, Jong-Hee Hwang1, Yong-Soo Cho |
Department of Materials Science and Engineering, Yonsei University 1Korea Institute of Ceramic Engineering & Technology |
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ABSTRACT |
Glass systems based on Ca, Sr, Ba, and Zn modified alumino-boro silicates were investigated in order to improve the dielectric and mechanical properties of a typical LTCC (low temperature co-fired ceramic) which was developed for high frequency highly-integrated modules. The glass was prepared by a typical melting procedure and then mixed with cordierite fillers to fabricate glass/ceramic composite-type LTCC materials. The amount of cordierite filler was fixed at 50 volumetric%. For an optimal glass composition of 7.5% CaO, 7.5% BaO, 5% ZnO, 10% $Al_2O_3$, 30% $B_2O_3$, and 40% $SiO_2$ in mole ratio, the resultant LTCC composite showed a dielectric constant of 5.8 and a dielectric loss ($tan{delta}$) of 0.0009 after firing at $900^{circ}C$. An average bending strength of 160MPa was obtained for the optimal composition. |
Key words:
Alumino-borosilicate, Low k, Cordierite, LTCC |
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