| 필터 프레싱으로 제조한 대형 알루미나 세라믹스 성형체 및 소결체의 특성 |
| 이현권, 조경식, 장민혁, 장철우1, 김상모1, 김미영1 |
금오공과대학교 신소재시스템공학부
1(주)원익쿼츠 세라믹사업부 |
| Characteristics of Large Green and Sintered Alumina Ceramics by Filter Pressing |
| Hyun-Kwuon Lee, Kyeong-Sik Cho, Min-Hyeok Jang, Chul-Woo Jang1, Sang-Mo Kim1, Mi-Young Kim1 |
School of Advanced Materials and System Engineering, Kumoh National Institute of Technology
1Ceramics Division, Wonik Quartz Co. |
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| ABSTRACT |
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The size of various alumina ceramics used in semiconductor and display industry is also required to increase with increase in wafer and panel size. In this research, large alumina ceramics was fabricated by filter pressing of alumina slurry using commercial powder and thereafter sintering at $1600^{circ}C$ in gas furnace. The characteristics of large alumina ceramics thereby were compared to those of small alumina ceramics prepared by pressure forming such as uniaxial pressing and CIP. Careful control of properties of alumina slurry and filter pressing made the fabrication of large alumina ceramics possible, and its characteristics were equivalent to those of small alumina ceramics. The large alumina ceramics, prepared by sintering the green body of 63% relative density at $1600^{circ}C$, exhibited both dense microstructure corresponding to 98.5% of relative density and 99.8% of high purity as in starting powder. |
| Key words:
Alumina, Filter pressing, Pressure forming, Microstructure, Sinterability |
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