| 스퍼터링 방법으로 증착된 실리콘 과잉 실리카 박막의 굴절률 분산 |
| 진병규, 최용규 |
| 한국항공대학교 항공재료공학과 |
| Refractive Index Dispersion of Sputter-Deposited Silicon-Rich Silica Thin Films |
| Byeong-Kyou Jin, Yong-Gyu Choi |
| Department of Materials Science and Engineering, Korea Aerospace University |
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| ABSTRACT |
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We have fabricated silicon-rich silica thin films via RF magnetron sputtering using a SiO target. Thickness evolution and microstructure change of such $SiO_x$ (1$SiO_x$ thin films turned out to be mainly responsible for the increase of refractive index. |
| Key words:
Silicon-rich silica, Thin film, Refractive index, Sputtering |
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