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J. Korean Ceram. Soc. > Volume 45(9); 2008 > Article
Journal of the Korean Ceramic Society 2008;45(9): 518.
doi: https://doi.org/10.4191/kcers.2008.45.9.518
Mechanical Properties of Chemical-Vapor-Deposited Silicon Carbide using a Nanoindentation Technique
Jong-Ho Kim, Hyeon-Keun Lee, Ji-Yeon Park1, Weon-Ju Kim1, Do-Kyung Kim
Department of Materials Science and Engineering, KAIST
1Nuclear Materials Research Division, KAERI
The mechanical properties of silicon carbide deposited by chemical vapor deposition process onto a graphite substrate are studied using nanoindentation techniques. The silicon carbide coating was fabricated in a chemical vapor deposition process with different microstructures and thicknesses. A nanoindentation technique is preferred because it provides a reliable means to measure the mechanical properties with continuous load-displacement recording. Thus, a detailed nanoindentation study of silicon carbide coatings on graphite structures was conducted using a specialized specimen preparation technique. The mechanical properties of the modulus, hardness and toughness were characterized. Silicon carbide deposited at $1300^{circ}C$ has the following values: E=316 GPa, H=29 GPa, and $K_c$=9.8 MPa $m^{1/2}$; additionally, silicon carbide deposited at $1350^{circ}C$ shows E=283 GPa, H=23 GPa, and $K_c$=6.1 MPa $m^{1/2}$. The mechanical properties of two grades of SiC coating with different microstructures and thicknesses are discussed.
Key words: Silicon carbide, Nanoindentation, Hardness, Modulus, Fracture toughness
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