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J. Korean Ceram. Soc. > Volume 44(6); 2007 > Article
Journal of the Korean Ceramic Society 2007;44(6): 313.
doi: https://doi.org/10.4191/kcers.2007.44.6.313
졸-겔 공정에 의해 제조된 ITO (Indium-Tin-Oxide) 박막의 표면처리
정승용, 윤영훈1, 연석주
동신대학교 보석공학과
1동신대학교 수소에너지학과
Surface Treatment of ITO (Indium-Tin-Oxide) thin Films Prepared by Sol-Gel Process
Seung-Yong Jung, Young-Hoon Yun1, Seog-Joo Yon
Department of Gemological Engineering, Dongshin University
1Department of Hydrogen and Fuel Cell Technology, Dongshin University
ITO (Indium-tin oxide) thin films have been prepared by a sol-gel spinning coating method and fired and annealed in the temperature range of $450-600^{circ}C$. The XRD patterns of the films indicated the main peak of (222) plane and showed higher crystallinity with increasing an annealing temperature. The surface of the ITO thin films were treated with 0.1 N HCl 20% solution at room temperature. The effects of surface treatment on electrical properties and surface morphologies of the ITO films were investigated with the results of sheet resistance and FE-SEM, AFM images. The samples, subsequently treated with acidic solution for 40 sec showed the sheet resistance of $0.982;k{Omega}/square$. The surface treatment using acidic solution diminished the RMS (root mean square) value and the residual carbon content of the ITO films. It seemed that the acid-cleaning of the ITO thin films lead to the decrease of surface roughness and sheet resistance.
Key words: ITO (Indium-tin oxide) films, Surface treatment, Sol-Gel process
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