| 1 wt% Y2O3 첨가계 AlN 세라믹스의 소결 조건에 따른 전기전도도 |
| 이원진, 이성민, 심광보1, 김형태 |
요업(세라믹)기술원 기능소재팀
1한양대학교 신소재공학과 |
| Effects of Sintering Conditions on the Electrical Conductivity of 1 wt% Y2O3-Doped AlN Ceramics |
| Won-Jin Lee, Sung-Min Lee, Kwang-Bo Shim1, Hyung-Tae Kim |
Korea Institute of Ceramic Engineering and Technology
1Department of Materials Science and Engineering, Hanyang University |
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| ABSTRACT |
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Electrical properties of AlN ceramics sintered with 1 wt% $Y_2O_3$ have been investigated. From the impedance spectroscopy, electrical conductivity of grain boundary was found to be much lower than that of grain. DC conductivity measurement showed the electrode polarization effects caused by blocking electrode. The heat-treatment at $1700^{circ}C$ of the specimen sintered at $1850^{circ}C$ transformed continuous pain boundary phases along triple boundary junctions into isolated particles in grain comers. The heat-treatment induced decreases both in grain and grain boundary conductivity, and in DC electrical conductivities. From the analysis on the transference number, ionic conductivity was shown to be more dominant than electron conductivity, which was due to ion compensation mechanism during oxygen incorporation into grain. |
| Key words:
AlN, Electrostatic chuck (ESC), DC conductivity, Impedance spectroscopy, Ionic conductivity |
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