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J. Korean Ceram. Soc. > Volume 43(12); 2006 > Article
Journal of the Korean Ceramic Society 2006;43(12): 852.
doi: https://doi.org/10.4191/kcers.2006.43.12.852
PLD(Pulsed Laser Deposition)를 이용한 청색 박막 형광체의 제조 및 특성분석
조상호, 정유선, 곽종호, 손기선
순천대학교 나노 신소재응용공학부
Preparation and Characterization of Blue Thin Film Phosphors by Pulsed Laser Deposition
Sang-Ho Cho, Yu-Sun Jung, Jung-Ho Kwak, Kee-Sun Sohn
Department of Materials Science and Metallurgical Engineering, Sunchon National University
It is well known that $BaMgAl_{10}O_{17}:Eu^{2+}$ (BAM) and $CaMgSi_2O_6:Eu^{2+}$ (CMS) are a highly efficient blue phosphor. However, these phosphors in the form of thin films have not yet been realized clue to technical difficulties. We prepared thin film type BAM and CMS phosphors on quartz glass substrate using a pulsed laser deposition technique. The luminescent and structural properties of thin film phosphors were monitored as a function of key processing parameters such as oxygen partial pressure inside the deposition chamber, deposition time, laser energy density and the type of post-deposition treatments used. Even though we could not obtain single homogenous phases, thin films with large homogenous areas and a high photoluminescence could be produced by optimizing these processing parameters.
Key words: PLD, Thin film phosphors, XRD, PL
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