| Effects of Codoping with Fluorine on the Properties of ZnO Thin Films |
| Young-Woo Heo, D.P. Norton1 |
Department of Inorganic Materials Engineering, Kyungpook National University
1Department of Materials Science and Engineering, University of Florida |
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| ABSTRACT |
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We report on the effects of co-doping with fluorine on properties of ZnO thin films grown by pulsed-laser deposition. The transport characteristics of Ag-F and Li-F codoped ZnO films were determined by Hall-effect measurements at room temperature. Ag-F codoped ZnO films showed n-type semiconducting behaviors. An ambiguous carrier type was observed in Li-F codoped ZnO films grown at a temperature of 500$^{circ}C$ with the oxygen pressures of 20 and 200 mTorr. The qualities of the codoped ZnO films were studied by X-ray diffraction, atomic force microscopy, X-ray photoemission spectroscopy, and photoluminescence. |
| Key words:
ZnO, p-type, Codoping |
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