| Effect of Cr2O3 Content on Densification and Microstructural Evolution of the Al2O3-Polycrystalline and Its Correlation with Toughness |
| Mi-Young Seo, Hee-Seung Kim, Ik-Jin Kim1 |
Institute of Advanced Ceramics for Semiconductor in BIEMT CO., LTD
1Institute for Processing and Application of Inorganic Materials (PAIM), Department of Materials Science and Engineering, Hanseo University |
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| ABSTRACT |
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The effects of $Cr_2O_3$ on the microstructural evolution and mechanical properties of $Al_2O_3$ polycrystalline were investigated. The microstructure of $Al_2O_3-Cr_2O_3$ composites (ruby) was carefully controlled in order to obtain dense and fine-grained ceramics, thereby improving their properties and reliability with respect to numerous applications related to semiconductor bonding technology. Ruby composites were produced by Ceramic Injection Molding (CIM) technology. Room temperature strength, hardness, Young's modulus and toughness were determined, as well as surface strengthening induced by thermal treatment and production of a fine-grained homogenous microstructure. |
| Key words:
$Al_2O_3-Cr_2O_3$ composites, Ruby, Microstructure, Injection molding, Toughness |
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