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J. Korean Ceram. Soc. > Volume 43(6); 2006 > Article
Journal of the Korean Ceramic Society 2006;43(6): 362.
doi: https://doi.org/10.4191/kcers.2006.43.6.362
Si기판 위에 Ba0.5Sr0.5TiO3 산화물 에피 박막의 집적화 및 박막의 유전 특성에 관한 연구
김은미, 문종하1, 이원재2, 김진혁1
전남대학교 무기재료공학과
1전남대학교 신소재공학부
2동의대학교 나노공학부
Integration of Ba0.5Sr0.5TiO3Epitaxial Thin Films on Si Substrates and their Dielectric Properties
Eun-Mi Kim, Jong-Ha Moon1, Won-Jae Lee2, Jin-Hyeok Kim1
Photonic and Electronic Thin Films Laboratory, Chonnam National University
1Department of Materials Science and Engineering, Chonnam National University
2Department of Information Material Engineering, Dongeui University
Epitaxial $Ba_{0.5}Sr_{0.5}TiO_3$ (BSTO) thin films have been grown on TiN buffered Si (001) substrates by Pulsed Laser Deposition (PLD) method and the effects of substrate temperature and oxygen partial pressure during the deposition on their dielectric properties and crystallinity were investigated. The crystal orientation, epitaxy nature, and microstructure of oxide thin films were investigated using X-Ray Diffraction (XRD) and Transmission Electron Microscopy (TEM). Thin films were prepared with laser fluence of $4.2;J/cm^2;and;3;J/cm^2$, repetition rate of 8 Hz and 10 Hz, substrate temperatures of $700^{circ}C$ and ranging from $350^{circ}C;to;700^{circ}C$ for TiN and oxide respectively. BSTO thin-films were grown on TiN-buffered Si substrates at various oxygen partial pressure ranging from $1{times}10^{-4}$ torr to $1{times}10^{-5}$ torr. The TiN buffer layer and BSTO thin films were grown with cube-on-cube epitaxial orientation relationship of $[110](001)_{BSTO}{parallel}[110](001)_{TiN}{parallel}[110](001)_{Si}$. The crystallinity of BSTO thin films was improved with increasing substrate temperature. C-axis lattice parameters of BSTO thin films, calculated from XRD ${theta}-2{theta}$ scans, decreased from 0.408 m to 0.404 nm and the dielectric constants of BSTO epitaxial thin films increased from 440 to 938 with increasing processing oxygen partial pressure.
Key words: $Ba_{0.5}Sr_{0.5}TiO_3$ (BSTO), Crystalline oxide on Si, PLD, Dielectric materials
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