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J. Korean Ceram. Soc. > Volume 42(11); 2005 > Article
Journal of the Korean Ceramic Society 2005;42(11): 763.
doi: https://doi.org/10.4191/kcers.2005.42.11.763
ReMnO3(Re:Ho, Er) 박막의 강유전성에 미치는 열처리 공정의 영향
김응수, 채정훈
경기대학교 재료공학과
Effects of Thermal Heat Treatment Process on the Ferroelectric Properties of ReMnO3 (Re:Ho, Er) Thin Films
Eung Soo Kim, Jung-Hoon Chae
Department of Materials Engineering, Kyonggi University
ABSTRACT
Ferroelectric $ReMnO_3$(Re:Ho, Er) thin films were deposited on Si(100) substrate by Metal-Organic Chemical Vapor Deposition (MOCVD). Crystallinity and electric properties of $ReMnO_3$(Re:Ho, Er) thin films were investigated as a function of thermal heat treatment process, CHP (Conventional Heat-treatment Process) and RTP (Rapid Thermal Process). $ReMnO_3$(Re:Ho, Er) thin films prepared by RTP showed higher c-axis preferred orientation and homogeneous surface roughness than those prepared by CHP. The remnant polarization of ferroelectric hysteresis loop of $ReMnO_3$(Re:Ho, Er) thin films was strongly dependent on the c
Key words: Heat treatment process, Ferroelectric properties, c-axis preferred orientation, Metal-Organic Chemical Vapor Deposition (MOCVD)
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