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J. Korean Ceram. Soc. > Volume 42(4); 2005 > Article
Journal of the Korean Ceramic Society 2005;42(4): 245.
doi: https://doi.org/10.4191/kcers.2005.42.4.245
초음파 열분해법를 이용한 ZnO 성장
김길영, 정연식1, 변동진2, 최원국1
고려대학교 재료공학과, 한국과학기술연구원 박막재료연구센터
1한국과학기술연구원 박막재료연구센터
2고려대학교 재료공학과
Growth of ZnO Film by an Ultrasonic Pyrolysis
Gil-Young Kim, Yeon-Sik Jung1, Dong-Jin Byun2, Won-Kook Choi1
Department of Materials Engineering, Korea University, Thin Film Materials Research Center, Korea Institute of Science and Technology
1Thin Film Materials Research Center, Korea Institute of Science and Technology
2Department of Materials Engineering, Korea University
ABSTRACT
ZnO was deposited on sapphire single crystal substrate by an ultrasonic pyrolysis of Zinc Acetate Dehydrate (ZAH) with carrying Ar gas. Through Thermogravimetry-Differential Scanning Calorimetry(TG-DSC), zinc acetate dihydrate was identified to be dissolved into ZnO above $380^{circ}C$. ZnO deposited at $380-700^{circ}C$ showed polycrystalline structures with ZnO (101) and ZnO (002) diffraction peaks like bulk ZnO in XRD, and from which c-axis strain ${Sigma}Z=0.2%$ and compressive biaxial stress$sigma=-0.907;GPa$ was obtained for the ZnO deposited $400^{circ}C$. Scanning electron microscope revealed that microstructures of the ZnO were dependent on the deposition temperature. ZnO grown below temperature $600^{circ}C$ were aggregate consisting of zinc acetate and ZnO particles shaped with nanoblades. On the other hand the grain of the ZnO deposited at $700^{circ}C$ showed a distorted hexagonal shape and was composed of many ultrafine ZnO powers of 10-25 nm in size. The formation of these ulrafine nm scale ZnO powers was explained by the model of random nucleation mechanism. The optical property of the ZnO was analyzed by the photoluminescence (PL) measurement.
Key words: ZnO, Ultrasonic pyrolysis, Zinc acetate dihydrate, Random nucleation, Photoluminescence
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