LTCC 내장 캐패시터용 BaTiO3계 세라믹스의 저온소결 및 유전특성 |
박정현, 최영진, 고원준, 박재환1, 남산2, 박재관1 |
한국과학기술연구원 복합기능세라믹스연구센터, 고려대학교 재료공학과 1한국과학기술연구원 복합기능세라믹스연구센터 2고려대학교 재료공학과 |
Low-Temperature Sintering and Dielectric Properties of BaTiO3-Based Ceramics for Embedded Capacitor of LTCC Module |
Jeong-Hyun Park, Young-Jin Choi, Won-Jun Ko, Jae-Hwan Park1, Sahn Nahm2, Jae-Gwan Park1 |
Multifunctional Ceramics Research Center, Korea Institute of Science and Technology, Department of Materials Science and Engineering, Korea University 1Multifunctional Ceramics Research Center, Korea Institute of Science and Technology 2Department of Materials Science and Engineering, Korea University |
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ABSTRACT |
The compositions for LTCC embedded capacitors based on $BaTiO_3$ ceramics with $5~15;wt%$ of lithium-borosilicate glass frits were studied. After the glass frits, which is chemically stable and has acceptable ability of low-temperature sintering, were added to the host dielectric materials, the sintering behavior and dielectric properties were evaluated. As for $BaTiO_3$, relative density of >$95%$, permittivity 990, and dielectric loss $3.1%$ were obtained when sintered at $925^{circ}C$ with 5 wt$%$ of glass frits. As for $(Ba,Ca)(Ti,Zr)O_3$ ceramics, relative density of >$95%$, open porosity <$0.5%$, permittivity 700, and dielectric loss $2%$ were obtained when sintered at $875^{circ}C$ with 10 wt$%$ of glass frits. |
Key words:
LTCC, Glass frits |
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