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J. Korean Ceram. Soc. > Volume 41(1); 2004 > Article
Journal of the Korean Ceramic Society 2004;41(1): 13.
doi: https://doi.org/10.4191/kcers.2004.41.1.013
Self-patterning Technique of Photosensitive La0.5Sr0.5CoO3 Electrode on Ferroelectric Sr0.9Bi2.1Ta2O9 Thin Films
Jong-Chun Lim, Tae-Young Lim1, Keun-Ho Auh2, Won-Kyu Park3, Byong-Ho Kim
Department of Materials Seience and Engineering, Korea University
1Korea Institute of Ceramic Engineering and Technology (KICET)
2department of Ceramic Engineering, Hanyang University
3Division of Advanced Materials Engineering, Paichai University
ABSTRACT
$La_{0.5}Sr_{0.5}CoO_3$ (LSCO) electrodes were prepared on ferroelectric $Sr_{0.9}Bi_{2.1}Ta_2O_9$(SBT) thin films by spin coating method using photosensitive sol-gel solution. Self-patterning technique of photosensitive sol-gel solution has advantages such as simple manufacturing process compared to photoresist/dry etching process. Lanthanum(III) 2-methoxyethoxide, Stronitium diethoxide. Cobalu(II)2-methoxyethoxide were used as starting materials for LSCO electrode. UV irradiation on LSCO thin films lead to decrease solubility by M-O-M bond formation and the solubility difference allows us to obtain self-patternine. There was little composition change of the LSCO thin films between before leaching and after leaching in 2-methoxyethanol. The lowest resistivity of LSCO thin films deposited on $SiO_2$/Si substrate was $1.1{times}10^{-2}{Omega}cm$ when the thin film was ennealed at $740^{circ}C$. The values of Pr/Ps and 2Pr of LSCO/SBT/Pt capacitor on the applied voltage of 5V were 0.51, 8.89 ${mu}C/cm^2$, respectively.
Key words: Self-patterning, Photosensitve, SBT, LSCO, Sol-gel solution
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