Effect of Deposition Parameters and Post-annealing on the Luminescent Properties of CaWO<sub>4</sub> Phosphor

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doi:2003.40.10.949

J. Korean Ceram. Soc. > Volume 40(10); 2003 > Article

Journal of the Korean Ceramic Society 2003;40(10): 949.
doi: https://doi.org/10.4191/kcers.2003.40.10.949

증착조건 및 열처리 분위기가 CaWO₄ 형광체의 발광특성에 미치는 영향

한상혁, 정승묵, 송국현¹, 김영진

경기대학교 첨단산업공학부 신소재공학전공
¹기술표준원 광전재료과

Effect of Deposition Parameters and Post-annealing on the Luminescent Properties of CaWO₄ Phosphor

ABSTRACT

Blue emitting CaWO$_4$ thin films were deposited by rf magnetron sputtering. The effect of sputtering parameters and annealing conditions on the luminescent properties were investigated. Structural and stoichiometric properties of thin films were affected by $O_2$/Ar gas ratio and substrate temperature. Post-annealing caused the phosphor thin films to emit improved luminescent properties. The atomic composition of films might depend on annealing atmosphere, which resulted in the changes of luminescent properties. Blue-green emission that was due to oxygen vacancies was observed. However, by controlling oxygen defects, only blue emission could be obtained.

Key words: $CaWO_4$, Phosphor, Photoluminescence, Sputtering