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J. Korean Ceram. Soc. > Volume 40(9); 2003 > Article
Journal of the Korean Ceramic Society 2003;40(9): 909.
doi: https://doi.org/10.4191/kcers.2003.40.9.909
졸-겔법으로 제조된 ZrO2/Al막의 열처리 온도에 따른 양극산화 특성
박상식, 이병택1
상주대학교 신소재공학과
1공주대학교 신소재공학과
Annealing Temperature Dependence on Anodizing Properties of ZrO2/Al Films Prepared by Sol-gel Method
Anodic oxide films on aluminum play an important role as a dielectrics in aluminum electrolytic capacitor. In order to obtain the high capacitance, ZrO$_2$ films were coated on aluminum foils by sol-gel method and then, the properties of anodized films were studied. The coating and drying of the films were repeated 4-10 times and annealed at 300~$600^{circ}C$ and the triple layer of ZrO$_2$/Al-ZrO$_{x}$ /Al$_2$O$_3$ was formed onto aluminum substrates after anodizing of ZrO$_2$/Al film. The thickness of $Al_2$O$_3$ layer was decreased with increasing the annealing temperature due to the densification of ZrO$_2$ film. The ZrO$_2$ films were crystallized even at 30$0^{circ}C$ and showed nanocrystalline structure. The. capacitance of aluminum foil annealed at low temperature was higher than that at high temperature. The increase of capacitance was due to the high capacitance of ZrO$_2$ film annealed at low temperature. The capacitance of ZrO$_2$ coated aluminum increased about 3 times compared to that without a ZrO$_2$ layer after anodizing to 400 V. From these results, the aluminum foils with composite oxide layers are found to be applicable to the aluminum electrolytic capacitor.
Key words: Al electrolytic capacitor, Sol-gel, Anodizing, $ZrO_2$
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