| Home | E-Submission | Sitemap | Login | Contact Us |  
J. Korean Ceram. Soc. > Volume 40(6); 2003 > Article
Journal of the Korean Ceramic Society 2003;40(6): 547.
doi: https://doi.org/10.4191/kcers.2003.40.6.547
ZnO 압전 박막을 이용한 고주파 SAW 필터 연구
박용욱, 신현용
남서울대학교 전자정보통신공학부
A Study on the ZnO Piezoelectric Thin Film SAW Filter for High Frequency
ZnO thin films on glass substrate were deposited by RF magnetron reactive sputtering at 100 W, 1.33 Pa, Ar/O2=50 : 50, 200$^{circ}C$, and a target/substrate distance of 4 cm. Crystallinities, surface morphologies, chemical compositions, and electrical properties of the films were investigated by XRD, SEM, AFM, RBS, and electrometer. All films showed a strong preferred c-axis orientation and the chemical stoichiometry. The propagation velocity of ZnO/IDT/glass of single electrode and double electrode types SAW filter was about 2,589 m/sec, 2,533 m/sec and insertion loss was a minimum value of about -11 dB and -21 dB, respectively.
Key words: ZnO thin film, Preferred orientation, Propagation velocity, Insertion loss, ZnO/IDT/glass, SAW filter
Editorial Office
Meorijae Bldg., Suite # 403, 76, Bangbae-ro, Seocho-gu, Seoul 06704, Korea
TEL: +82-2-584-0185   FAX: +82-2-586-4582   E-mail: ceramic@kcers.or.kr
About |  Browse Articles |  Current Issue |  For Authors and Reviewers
Copyright © The Korean Ceramic Society.                      Developed in M2PI