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J. Korean Ceram. Soc. > Volume 40(2); 2003 > Article
Journal of the Korean Ceramic Society 2003;40(2): 198.
doi: https://doi.org/10.4191/kcers.2003.40.2.198
Seed-layer 공정을 이용한 Ba0.66Sr0.34TiO3박막의 제조 및 전기적 특성 연구
최덕영, 박철호, 손영국
부산대학교 무기재료공학과
Electrical Properties of Ba0.66Sr0.34TiO3 Thin Films Fabricated by a Seed-layer Process
$Ba_{0.66}Sr_{0.34}TiO_3$ thin films and seed-layers were deposited on $Pt/Ti/SiO_2/Si$substrate by R.F. magnetron sputtering method. Effects of various substrate temperature conditions on electrical properties (such as capacitance and leakage current) of BST thin films were studied. The effect of seed-layer was also studied. When seed-layer was inserted between BST and Pt, the crystallization of the BST thin films was considerably improved and the processing temperature was lowered. Compared to the pure BST thin films, dielectric constant, dielectric loss, and leakage current of BST thin films deposited on the seed-layer were considerably improved. It could be revealed that electrical properties are influenced by the substrate temperatures of BST thin films and are enhanced by the seed-layer.섂돀衆Η⨀塨
Key words: (${Ba_{0.66}}{Sr_{0.34}}{TiO_3}$_BST, Thin film, Ferroelectric properties, Seed-layer
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