| UV노광 공정 도입이 Sol-gel 법으로 제조된 Sr0.9Bi2.1Ta2O9박막의 결정화에 미치는 영향 |
| 최병옥, 김병호 |
| 고려대학교 재료공학과 |
| Effect of the Introduction of UV Irradiation on Crystallization of Sr0.9Bi2.1Ta2O9 Thin Films by Sol-gel Method |
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| ABSTRACT |
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$Sr_{0.9}Bi_{2.1}Ta_2O_9$thin films were deposited on $IrO_2$ electrode by spin coating method using photosensitive sol-gel solution. To ensure the UV-exposure effect on SBT thin films, UV irradiated films and non-UV irradiated films were analyzed by XRD, SEM. As a result, UV-irradiation on SBT thin films promoted grain growth of SBT compared with no UV irradiation. In case of the UV irradiated films annealed at$740{circ}C$for 1 h in an oxygen ambient, the 2Pr value and Pr/Ps at${pm}5$V were$11.48{mu}C/cm^2$and 0.53, respectively. 2Pr values of the UV irradiated SBT thin films at$660-740{circ}C were approximately 12% higher than those of non-UV irradiated thin films. |
| Key words:
Sol-gel, SBT, UV exposure, UV-irradiation |
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