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J. Korean Ceram. Soc. > Volume 39(12); 2002 > Article
Journal of the Korean Ceramic Society 2002;39(12): 1149.
doi: https://doi.org/10.4191/kcers.2002.39.12.1149
압입법에 의한 실리콘의 상전이
김성순, 이홍림
연세대학교 세라믹공학과
Phase Transformation of Silicon by Indentation
Sung-Soon Kim, Hong-Lim Lee
Department of Ceramic Engineering, Yonsei University
Indentation was used to analyze high pressure phases of silicon. Phase transformations on both loading time and loading rate were studied. Micro-raman spectroscopy was used to observe the indentation-induced transformations. As the loading time increased, Si-III and Si-XII disappeared and only a-Si was observed in (111) samples. As the loading time increased, the residual stress was removed by creation of cracks or dislocations. At 0.1 mm/min loading rate, pop-in . At 5 mm/min loading rate pop-in was observed in force/displacement curve of (111) sample, but pop-in was not observed in force/displacement curve of (100) sample. This result indicates that the loading rate affects the volume of phase transformation in silicon.
Key words: Indentation, Holding time, Loading rate, Pop-in
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