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J. Korean Ceram. Soc. > Volume 39(12); 2002 > Article
Journal of the Korean Ceramic Society 2002;39(12): 1171.
doi: https://doi.org/10.4191/kcers.2002.39.12.1171
전자빔 증착법에 의해 형성된 MgO 박막의 증착 및 특성
이춘호, 김선일, 신호식1
계명대학교 재료공학과
A Study on the Characteristics of MgO Thin Films Prepared by Electron Beam
Choon-Ho Lee, Sun-Il Kim, Ho-Shik Shin1
Department of Materials Engineering, Keimyung University
1Thin Film Devision, Tae Yang Electronics Co., LTD.
The growth characteristics on the MgO thin films prepared by the e-beam evaporation method have been investigated. We observed the film of preferred orientation and surface morphology with various parameters such as substrate temperature, deposition rate on Si(100) and slide glass respectively. Consequently, it was shown that MgO(111) preferred orientation films can be obtained as the deposition rate was increased on Si(100) substrate. MgO(220) peak was found as the substrate temperature was increased. Whereas, in case of slide glass the orientation is changed from (200) to (111) by substrate temperature. Also we investigated the relationship between the film characteristics and the orientation of MgO thin films.
Key words: E-beam evaporation, Preferred orientation, AC PDP, Slide glass, Si(100)
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