| 디스플레이용 SiO2/ITO 투명전도막의 반사특성 |
| 신용욱, 김상우, 윤기현1 |
한국과학기술연구원 나노재료연구센터
1연세대학교 세라믹공학과 |
| Reflection Properties of SiO2/ITO Transparent and Conductive Thin Films for Display |
| Yong-Wook Shin, Sang-Woo Kim, Ki-Hyun Yoon1 |
Nano Materials Research Center, KIST
1Department of Ceramic Engineering, Yonsei University |
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| ABSTRACT |
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Reflection properties of $SiO_2$/ITO (Indium Tin Oxide) thin films coated for electromagnetic shielding, anti-static and anti-reflection on the front surface in CRT were studied. The behavior of reflectance as a function of thickness of $SiO_2$/ITO was investigated and applied to theoretical anti0reflection model of double layers and three layers. As the thickness of ITO layer increased, the deviation from theoretical value increased because uniformity of film deteriorated by pore. Because of the effect of mixed layer of $SiO_2$ and ITO, experimental reflectance showed better acceptance to the three layer antireflection model of $SiO_2$/$SiO_2$+ITO/ITO than the two layer model. Based on the theoretical antireflection design, the double layer whose thickness of $SiO_2$ and ITO were 90, 65 nm, respectively appear 2.5% in reflectance at standard wavelength, 550 nm. This phenomenon was similar to theoretical reflectance in visual range. |
| Key words:
CRT, SiO$_2$/ITO, Reflectance, Antireflection |
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