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J. Korean Ceram. Soc. > Volume 39(4); 2002 > Article
Journal of the Korean Ceramic Society 2002;39(4): 394.
doi: https://doi.org/10.4191/kcers.2002.39.4.394
R.F. Magnetron Sputtering을 이용한 리튬이차전지 부극용 Sn1-xSixO2의 제조 및 특성
이상헌, 박건태, 손영국
부산대학교 무기재료공학과
Fabrication and Characterization of Sn1-xSixO2 Anode for Lithium Secondary Battery by R.F. Magnetron Sputtering Method
Sang-Heon Lee, Keun-Tae Park, Young-Guk Son
School of materials Science & Engineering, Pusan national University
Tin oxide thin films doped with silicon as anodes for lithium secondary battery were fabricated by R. F. magnetron sputtering technique. The electrochemical results for lithium secondary battery anodes showed that addition of silicon decreases the oxidic state of tin, and, hence, reduced the irreversible capacity during the first discharge/charge cycle. The (110),(101),(211) planes were grown with increasing substrate temperatures. The reversible capacity of thin films fabricated in conditions of $300^{circ}C$ substrate temperature and 7:3 $Ar:O_2$ ratio was 700 mAh/g.ጊ缀Ѐ㘰〻Ԁ䭃䑎䷙᜘༤ 6㜱⸳㜰㔻Ԁ䭃䑎䴀
Key words: Sn$_{1-x}Si_xO_2$, R.F. magnetron sputtering, Lithium secondary battery
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