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J. Korean Ceram. Soc. > Volume 39(9); 2002 > Article
Journal of the Korean Ceramic Society 2002;39(9): 884.
doi: https://doi.org/10.4191/kcers.2002.39.9.884
지르코늄 나프테네이트를 이용한 나노결정질 ZrO2 박막의 제조와 칼슘 포스페이트 형성 능력의 평가
오정선, 안준형1, 윤연흠1, 강보안1, 김상복1, 황규석1, 심연아2
조선대학교 화학과
1남부대학교 자동차기계공학부 생산 자동화 연구소
2전남대학교 세라믹공학과
Preparation of Nanocrystalline ZrO2 Film by Using a Zirconium Naphthenate and Evaluation of Calcium Phosphate Forming Ability
Jeong-Sun Oh, Jun-Hyung Ahn1, Yeon-Hum Yun1, Bo-An Kang1, Sang-Bok Kim1, Kyu-Seog Hwang1, Yeon-A Shim2
Department of Chemistry, College of Natural Science, Chosun University
1School of Automotive and Mechanical Engineering and Institute of Manufacturing and Automation System, Nambu University
2Department of Ceramic Engineering, Chonnam National University
In order to investigate the calcium phosphate forming ability of nanocrystalline $ZrO_2$ film, we prepared $ZrO_2/Si$ structure by using a chemical solution deposition with a zirconium naphthenate as a starting material. Precursor sol was spin-coated onto the (100)Si substrate and prefired at 500$^{circ}C$ for 10 min in air, followed by final annealing at 800$^{circ}C$ for 30 min in air. Crystallinity of the annealed film was examined by X-ray diffraction analysis. Surface morphology and surface roughness of the film were characterized by field emission-scanning electron microscope and atomic force microscope. After annealing, nanocrystalline $ZrO_2$ grains were obtained on the surface of the film with a homogeneous interface between the film and substrate. After immersion for 1 or 5 days in a simulated body fluid, formation of calcium phosphate was observed on $ZrO_2$ film annealed at 800$^{circ}C$ by energy dispersive X-ray spectrometer. The fourier transform infrared spectroscopy revealed that carbonate was substituted into the calcium phosphate.
Key words: Nanocrystalline $ZrO_2 film$, Zirconium naphthenate, Calcium phosphate
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