Preparation of PZT(52/48) Piezoelectric Thick Film by Screen Printing Method

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J. Korean Ceram. Soc. > Volume 38(8); 2001 > Article

Journal of the Korean Ceramic Society 2001;38(8): 724.

스크린 인쇄법에 의한 PZT(52/48) 압전후막의 제조

김태송, 김용범¹, 최두진¹, 윤석진², 정형진²

한국과학기술연구원 마이크로시스템연구센터
¹연세대학교 세라믹공학과
²한국과학기술연구원 박막기술연구센터

Preparation of PZT(52/48) Piezoelectric Thick Film by Screen Printing Method

Key words: PZT, Thick film, Screen printing, Piezoelectric

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