Preparation of AlN Thin Film with New Type of Single Precursor

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J. Korean Ceram. Soc. > Volume 38(8); 2001 > Article

Journal of the Korean Ceramic Society 2001;38(8): 761.

새로운 단일 전구체를 이용한 AIN 박막의 제조

최승철, 안창규, 한성환¹

아주대학교 재료공학과
¹한국과학기술연구원 청정기술센터

Preparation of AlN Thin Film with New Type of Single Precursor

Key words: MOCVD, AlN, Single precursor, c-axis oriented

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