Effects of Sol-Gel Process and <TEX>$IrO_2$</TEX>Bottom Electrode for Lowering Process Temperature of SBT Thin Films

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J. Korean Ceram. Soc. > Volume 38(1); 2001 > Article

Journal of the Korean Ceramic Society 2001;38(1): 39.

SBT 박막의 저온화 공정을 위한 솔-젤법과 $IrO_2$하부전극의 효과

선봉균, 송석표, 김병호

고려대학교 재료공학과

Effects of Sol-Gel Process and $IrO_2$Bottom Electrode for Lowering Process Temperature of SBT Thin Films

Key words: Sol-gel process, SBT thin film, $IrO_2$electrode

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